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Journal: Micromachines, 2024
Volume: 15
Number: 1070

Article: Acoustic Transmission Measurements for Extracting the Mechanical Properties of Complex 3D MEMS Transducers
Authors: by Dennis Becker, Moritz Littwin, Achim Bittner and Alfons Dehé
Link: https://www.mdpi.com/2072-666X/15/9/1070

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