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Journal: Micromachines, 2024
Volume: 15
Number: 942
Article:
An FEM Study on Minimizing Electrostatic Cross-Talk in a Comb Drive Micro Mirror Array
Authors:
by
Andreas Neudert, Peter Duerr and Mario Nitzsche
Link:
https://www.mdpi.com/2072-666X/15/8/942
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