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Journal: Micromachines, 2024
Volume: 15
Number: 1017

Article: A Large-Scan-Range Electrothermal Micromirror Integrated with Thermal Convection-Based Position Sensors
Authors: by Anrun Ren, Yingtao Ding, Hengzhang Yang, Teng Pan, Ziyue Zhang and Huikai Xie
Link: https://www.mdpi.com/2072-666X/15/8/1017

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