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Journal: Micromachines, 2024
Volume: 15
Number: 879

Article: Piezoelectric Micromachined Microphone with High Acoustic Overload Point and with Electrically Controlled Sensitivity
Authors: by Libor Rufer, Josué Esteves, Didace Ekeom and Skandar Basrour
Link: https://www.mdpi.com/2072-666X/15/7/879

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