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Journal: Micromachines, 2024
Volume: 15
Number: 781
781
Article: Design, Fabrication, Characterization, and Simulation of AlN-Based Piezoelectric Micromachined Ultrasonic Transducer for Sonar Imaging Applications
Authors: by Wenxing Chen, Shenglin Ma, Xiaoyi Lai, Zhizhen Wang, Hui Zhao, Qiang Zha, Yihsiang Chiu and Yufeng Jin
Link: https://www.mdpi.com/2072-666X/15/6/781

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