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Journal: Micromachines, 2024
Volume: 15
Number: 665
Article:
Influence of Growth Process on Suppression of Surface Morphological Defects in 4H-SiC Homoepitaxial Layers
Authors:
by
Yicheng Pei, Weilong Yuan, Yunkai Li, Ning Guo, Xiuhai Zhang and Xingfang Liu
Link:
https://www.mdpi.com/2072-666X/15/6/665
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