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Journal: Micromachines, 2024
Volume: 15
Number: 637
637
Article: Grooving and Absorption on Substrates to Reduce the Bulk Acoustic Wave for Surface Acoustic Wave Micro-Force Sensors
Authors: by Yang Feng, Haoda Yu, Wenbo Liu, Keyong Hu, Shuifa Sun, Zhen Yang and Ben Wang
Link: https://www.mdpi.com/2072-666X/15/5/637

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