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Journal: Micromachines, 2024
Volume: 15
Number: 632
632
Article: Femtosecond Laser Percussion Drilling of Silicon Using Repetitive Single Pulse, MHz-, and GHz-Burst Regimes
Authors: by Pierre Balage, Manon Lafargue, Théo Guilberteau, Guillaume Bonamis, Clemens Hönninger, John Lopez and Inka Manek-Hönninger
Link: https://www.mdpi.com/2072-666X/15/5/632

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