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Journal: Micromachines, 2024
Volume: 15
Number: 600
Article:
Research on the Influence of Carbon Sources and Buffer Layers on the Homogeneous Epitaxial Growth of 4H-SiC
Authors:
by
Weilong Yuan, Yicheng Pei, Yunkai Li, Ning Guo, Xiuhai Zhang and Xingfang Liu
Link:
https://www.mdpi.com/2072-666X/15/5/600
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