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Journal: Micromachines, 2024
Volume: 15
Number: 459
Article:
A Systematic Study of the Factors Affecting the Surface Quality of Chemically Vapor-Deposited Diamond during Chemical and Mechanical Polishing
Authors:
by
Zewei Yuan, Zhihui Cheng and Yusen Feng
Link:
https://www.mdpi.com/2072-666X/15/4/459
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