Modeling and Simulation of Graphene-Based Transducers in NEMS Accelerometers
Abstract
:1. Introduction
2. Results
2.1. Displacement
2.2. Strain
2.3. Resonant Frequency
2.4. Fracture Strength
3. Conclusions
Author Contributions
Funding
Data Availability Statement
Conflicts of Interest
References
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Materials | Young’s Modulus (GPa) | Poisson’s Ratio | Density (kg/m3) |
---|---|---|---|
Suspended graphene | 1000 | 0.16 | 2250 |
SiO2 layer | 71 | 0.17 | 2200 |
Si layer | 170 | 0.28 | 2330 |
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He, C.; Ding, J.; Fan, X. Modeling and Simulation of Graphene-Based Transducers in NEMS Accelerometers. Micromachines 2024, 15, 409. https://doi.org/10.3390/mi15030409
He C, Ding J, Fan X. Modeling and Simulation of Graphene-Based Transducers in NEMS Accelerometers. Micromachines. 2024; 15(3):409. https://doi.org/10.3390/mi15030409
Chicago/Turabian StyleHe, Chang, Jie Ding, and Xuge Fan. 2024. "Modeling and Simulation of Graphene-Based Transducers in NEMS Accelerometers" Micromachines 15, no. 3: 409. https://doi.org/10.3390/mi15030409