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Effect of Deposition Pressure and Temperature on Tungsten Thin-Film Heater for Phase-Change Switch Applications
 
 

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Journal: Micromachines, 2024
Volume: 15
Number: 1503

Article: Thin-Film Deposition: From Fundamental Research to Applications
Authors: by Laura Patricia Rivera Reséndiz and José Guadalupe Quiñones Galván
Link: https://www.mdpi.com/2072-666X/15/12/1503

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