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Journal: Micromachines, 2024
Volume: 15
Number: 1421

Article: Electrostatic MEMS Two-Dimensional Scanning Micromirrors Integrated with Piezoresistive Sensors
Authors: by Yameng Shan, Lei Qian, Kaixuan He, Bo Chen, Kewei Wang, Wenchao Li and Wenjiang Shen
Link: https://www.mdpi.com/2072-666X/15/12/1421

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