Shan, Y.; Qian, L.; He, K.; Chen, B.; Wang, K.; Li, W.; Shen, W.
Electrostatic MEMS Two-Dimensional Scanning Micromirrors Integrated with Piezoresistive Sensors. Micromachines 2024, 15, 1421.
https://doi.org/10.3390/mi15121421
AMA Style
Shan Y, Qian L, He K, Chen B, Wang K, Li W, Shen W.
Electrostatic MEMS Two-Dimensional Scanning Micromirrors Integrated with Piezoresistive Sensors. Micromachines. 2024; 15(12):1421.
https://doi.org/10.3390/mi15121421
Chicago/Turabian Style
Shan, Yameng, Lei Qian, Kaixuan He, Bo Chen, Kewei Wang, Wenchao Li, and Wenjiang Shen.
2024. "Electrostatic MEMS Two-Dimensional Scanning Micromirrors Integrated with Piezoresistive Sensors" Micromachines 15, no. 12: 1421.
https://doi.org/10.3390/mi15121421
APA Style
Shan, Y., Qian, L., He, K., Chen, B., Wang, K., Li, W., & Shen, W.
(2024). Electrostatic MEMS Two-Dimensional Scanning Micromirrors Integrated with Piezoresistive Sensors. Micromachines, 15(12), 1421.
https://doi.org/10.3390/mi15121421