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Journal: Micromachines, 2024
Volume: 15
Number: 1412

Article: Novel Deposition Technique for Fabricating Films with Customized Thickness Profiles
Authors: by Chi-Yung Hsieh, Yu-Chi Lin, Xuan-Shan Huang, Jing-Ting Lin and Cheng-Sheng Huang
Link: https://www.mdpi.com/2072-666X/15/12/1412

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