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Journal: Micromachines, 2024
Volume: 15
Number: 1412
Article:
Novel Deposition Technique for Fabricating Films with Customized Thickness Profiles
Authors:
by
Chi-Yung Hsieh, Yu-Chi Lin, Xuan-Shan Huang, Jing-Ting Lin and Cheng-Sheng Huang
Link:
https://www.mdpi.com/2072-666X/15/12/1412
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