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Journal: Micromachines, 2024
Volume: 15
Number: 1263

Article: Air Leakages at Microvalves: Pressure Decay Measurements and Extended Continuum Modelling of Knudsen Flows
Authors: by Daniel Anheuer, Johannes Schwarz, Patrick Debera, Klaus Heinrich, Christoph Kutter and Martin Richter
Link: https://www.mdpi.com/2072-666X/15/10/1263

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