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Journal: Micromachines, 2024
Volume: 15
Number: 72

Article: Stepped-Tube Backside Cavity Piezoelectric Ultrasound Transducer Based on Sc0.2AI0.8N Thin Films
Authors: by Xiaobao Li, Haochen Lyu, Ahmad Safari and Songsong Zhang
Link: https://www.mdpi.com/2072-666X/15/1/72

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