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Journal: Micromachines, 2024
Volume: 15
Number: 12
Article:
Optimization of Surface Acoustic Wave Resonators on 42°Y-X LiTaO3/SiO2/Poly-Si/Si Substrate for Improved Performance and Transverse Mode Suppression
Authors:
by
Hongzhi Pan, Yang Yang, Lingqi Li, Qiaozhen Zhang, Zeyu Zheng, Xuesong Du, Pingjing Chen, Jiahe Dong, Chuan Lu, Xiao Xie, Hualin Li, Qiang Xiao, Jinyi Ma and Zhenglin Chen
Link:
https://www.mdpi.com/2072-666X/15/1/12
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