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Journal: Micromachines, 2023
Volume: 14
Number: 1745
1745
Article: Partially Etched Piezoelectric Film Filled with SiO₂ Structure Applied to A1 Mode Resonators for Transverse Modes Suppression
Authors: by Zhenyi Yu, Yu Guo, Sulei Fu, Baichuan Li, Peisen Liu, Shuai Zhang and Zongqin Sun
Link: https://www.mdpi.com/2072-666X/14/9/1745

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