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Journal: Micromachines, 2023
Volume: 14
Number: 1565

Article: Structural Design of MEMS Acceleration Sensor Based on PZT Plate Capacitance Detection
Authors: by Min Cui, Senhui Chuai, Yong Huang, Yang Liu and Jian Li
Link: https://www.mdpi.com/2072-666X/14/8/1565

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