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Journal: Micromachines, 2023
Volume: 14
Number: 1550
1550
Article: High-Efficiency and Reliable Value Geometric Standard: Integrated Periodic Structure Reference Materials
Authors: by Chenying Wang, Di Liu, Yaxin Zhang, Weixuan Jing, Song Wang, Feng Han, Qi Mao, Yonglu Wang, Pengcheng Zhang and Zhuangde Jiang
Link: https://www.mdpi.com/2072-666X/14/8/1550

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