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Journal: Micromachines, 2023
Volume: 14
Number: 1430

Article: Fabrication of High Aspect Ratio Nano-Channels by Thermal Nano-Imprinting and Parylene Deposition
Authors: by Kun Yang, Zhifu Yin and Lei Sun
Link: https://www.mdpi.com/2072-666X/14/7/1430

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