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Journal: Micromachines, 2023
Volume: 14
Number: 992

Article: Study of Atmospheric Pressure Plasma Temperature Based on Silicon Carbide Etching
Authors: by Shaozhen Xu, Julong Yuan, Jianxing Zhou, Kun Cheng and Hezhong Gan
Link: https://www.mdpi.com/2072-666X/14/5/992

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