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Journal: Micromachines, 2023
Volume: 14
Number: 981
981
Article: A Single-Side Micromachined MPa-Scale High-Temperature Pressure Sensor
Authors: by Peng Li, Wei Li, Changnan Chen, Sheng Wu, Pichao Pan, Ke Sun, Min Liu, Jiachou Wang and Xinxin Li
Link: https://www.mdpi.com/2072-666X/14/5/981

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