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Journal: Micromachines, 2023
Volume: 14
Number: 1089
Article:
Lateral Extensional Mode Piezoelectric ZnO-on-Nickel RF MEMS Resonators for Back-End-of-Line Integration
Authors:
by
Adnan Zaman, Abdulrahman Alsolami, Mian Wei, Ivan Rivera, Masoud Baghelani and Jing Wang
Link:
https://www.mdpi.com/2072-666X/14/5/1089
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