Hao, L.; Li, C.; Wang, L.; Bai, B.; Zhao, Y.; Luo, C.
Design and Fabrication of a High-Temperature SOI Pressure Sensor with Optimized Crossbeam Membrane. Micromachines 2023, 14, 1045.
https://doi.org/10.3390/mi14051045
AMA Style
Hao L, Li C, Wang L, Bai B, Zhao Y, Luo C.
Design and Fabrication of a High-Temperature SOI Pressure Sensor with Optimized Crossbeam Membrane. Micromachines. 2023; 14(5):1045.
https://doi.org/10.3390/mi14051045
Chicago/Turabian Style
Hao, Le, Cun Li, Lukang Wang, Bing Bai, Yulong Zhao, and Chao Luo.
2023. "Design and Fabrication of a High-Temperature SOI Pressure Sensor with Optimized Crossbeam Membrane" Micromachines 14, no. 5: 1045.
https://doi.org/10.3390/mi14051045
APA Style
Hao, L., Li, C., Wang, L., Bai, B., Zhao, Y., & Luo, C.
(2023). Design and Fabrication of a High-Temperature SOI Pressure Sensor with Optimized Crossbeam Membrane. Micromachines, 14(5), 1045.
https://doi.org/10.3390/mi14051045