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Experimental Study on Shear Rheological Polishing of Si Surface of 4H-SiC Wafer
 
 

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Journal: Micromachines, 2023
Volume: 14
Number: 852

Article: Research on Abrasive Water Jet Polishing of Silicon Carbide Based on Fluid Self-Excited Oscillation Pulse Characteristics
Authors: by Hong Zhang, Baochun Tao, Qianfa Deng, Chengqi Zhang, Binghai Lyu and Duc-Nam Nguyen
Link: https://www.mdpi.com/2072-666X/14/4/852

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