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Journal: Micromachines, 2023
Volume: 14
Number: 802
802
Article: An Optical Measuring Transducer for a Micro-Opto-Electro-Mechanical Micro-g Accelerometer Based on the Optical Tunneling Effect
Authors: by Evgenii Barbin, Tamara Nesterenko, Aleksei Koleda, Evgeniy Shesterikov, Ivan Kulinich and Andrey Kokolov
Link: https://www.mdpi.com/2072-666X/14/4/802

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