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Journal: Micromachines, 2023
Volume: 14
Number: 580
580
Article: Process Development for Batch Production of Micro-Milling Tools Made of Silicon Carbide by Means of the Dry Etching Process
Authors: by Christian-G. R. Wittek, Lukas Steinhoff, Selina Raumel, Michael Reißfelder, Folke Dencker and Marc C. Wurz
Link: https://www.mdpi.com/2072-666X/14/3/580

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