Nian, L.; Qu, Y.; Gu, X.; Luo, T.; Xie, Y.; Wei, M.; Cai, Y.; Liu, Y.; Sun, C.
Preparation, Characterization, and Application of AlN/ScAlN Composite Thin Films. Micromachines 2023, 14, 557.
https://doi.org/10.3390/mi14030557
AMA Style
Nian L, Qu Y, Gu X, Luo T, Xie Y, Wei M, Cai Y, Liu Y, Sun C.
Preparation, Characterization, and Application of AlN/ScAlN Composite Thin Films. Micromachines. 2023; 14(3):557.
https://doi.org/10.3390/mi14030557
Chicago/Turabian Style
Nian, Laixia, Yuanhang Qu, Xiyu Gu, Tiancheng Luo, Ying Xie, Min Wei, Yao Cai, Yan Liu, and Chengliang Sun.
2023. "Preparation, Characterization, and Application of AlN/ScAlN Composite Thin Films" Micromachines 14, no. 3: 557.
https://doi.org/10.3390/mi14030557
APA Style
Nian, L., Qu, Y., Gu, X., Luo, T., Xie, Y., Wei, M., Cai, Y., Liu, Y., & Sun, C.
(2023). Preparation, Characterization, and Application of AlN/ScAlN Composite Thin Films. Micromachines, 14(3), 557.
https://doi.org/10.3390/mi14030557