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Journal: Micromachines, 2023
Volume: 14
Number: 526
526
Article: Comparative Study on Microstructure of Mo/Si Multilayers Deposited on Large Curved Mirror with and without the Shadow Mask
Authors: by Xiangyue Liu, Zhe Zhang, Hongxuan Song, Qiushi Huang, Tonglin Huo, Hongjun Zhou, Runze Qi, Zhong Zhang and Zhanshan Wang
Link: https://www.mdpi.com/2072-666X/14/3/526

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