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Journal: Micromachines, 2023
Volume: 14
Number: 279

Article: Fabrication of Aluminum Oxide Thin-Film Devices Based on Atomic Layer Deposition and Pulsed Discrete Feed Method
Authors: by Shih-Chin Lin, Ching-Chiun Wang, Chuen-Lin Tien, Fu-Ching Tung, Hsuan-Fu Wang and Shih-Hsiang Lai
Link: https://www.mdpi.com/2072-666X/14/2/279

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