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Journal: Micromachines, 2023
Volume: 14
Number: 260
260
Article: Influence of O₂ Flow Rate on the Properties of Ga₂O₃ Growth by RF Magnetron Sputtering
Authors: by Dengyue Li, Hehui Sun, Tong Liu, Hongyan Jin, Zhenghao Li, Yaxin Liu, Donghao Liu and Dongbo Wang
Link: https://www.mdpi.com/2072-666X/14/2/260

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