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Journal: Micromachines, 2023
Volume: 14
Number: 2104
2104
Article: Comprehensive Comparison of MOCVD- and LPCVD-SiN_x Surface Passivation for AlGaN/GaN HEMTs for 5G RF Applications
Authors: by Longge Deng, Likun Zhou, Hao Lu, Ling Yang, Qian Yu, Meng Zhang, Mei Wu, Bin Hou, Xiaohua Ma and Yue Hao
Link: https://www.mdpi.com/2072-666X/14/11/2104

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