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Journal: Micromachines, 2023
Volume: 14
Number: 2060
2060
Article: Nano Hotplate Fabrication for Metal Oxide-Based Gas Sensors by Combining Electron Beam and Focused Ion Beam Lithography
Authors: by Zhifu Feng, Damiano Giubertoni, Alessandro Cian, Matteo Valt, Mario Barozzi, Andrea Gaiardo and Vincenzo Guidi
Link: https://www.mdpi.com/2072-666X/14/11/2060

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