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Journal: Micromachines, 2023
Volume: 14
Number: 1965
Article:
Nonconventional Tether Structure for Quality Factor Enhancement of Thin-Film-Piezoelectric-on-Si MEMS Resonator
Authors:
by
Mohammed Awad, Temesgen Bailie Workie, Jingfu Bao and Ken-ya Hashimoto
Link:
https://www.mdpi.com/2072-666X/14/10/1965
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