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Journal: Micromachines, 2023
Volume: 14
Number: 1891

Article: The High-Efficiency Design Method for Capacitive MEMS Accelerometer
Authors: by Wen Liu, Tianlong Zhao, Zhiyuan He, Jingze Ye, Shaotong Gong, Xianglong Wang and Yintang Yang
Link: https://www.mdpi.com/2072-666X/14/10/1891

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