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Journal: Micromachines, 2023
Volume: 14
Number: 211

Article: Influence of Electrostatic Force Nonlinearity on the Sensitivity Performance of a Tapered Beam Micro-Gyroscope Based on Frequency Modulation
Authors: by Kunpeng Zhang, Jianwei Xie, Shuying Hao, Qichang Zhang and Jingjing Feng
Link: https://www.mdpi.com/2072-666X/14/1/211

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