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Journal: Micromachines, 2023
Volume: 14
Number: 210
210
Article: Fabrication and DC-Bias Manipulation Frequency Characteristics of AlN-Based Piezoelectric Micromachined Ultrasonic Transducer
Authors: by Tao Li, Le Zhang, Wenping Geng, Jian He, Yongkang Rao, Jiabing Huo, Kunxian Yan and Xiujian Chou
Link: https://www.mdpi.com/2072-666X/14/1/210

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