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Journal: MicromachinesVolume: 13Number: 1202
Article: Design and Characterization of a Planar Micro-Conveyor Device Based on Cooperative Legged Piezoelectric MEMS Resonators
- Authors:
- Víctor Ruiz-Díez1,*,
- Abdallah Ababneh2 and
- Helmut Seidel3
- et al.
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