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Journal: Micromachines, 2022
Volume: 13
Number: 1202
Article:
Design and Characterization of a Planar Micro-Conveyor Device Based on Cooperative Legged Piezoelectric MEMS Resonators
Authors:
by
VÃctor Ruiz-DÃez, Abdallah Ababneh, Helmut Seidel and José Luis Sánchez-Rojas
Link:
https://www.mdpi.com/2072-666X/13/8/1202
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