Order Article Reprints
Journal: Micromachines, 2022
Volume: 13
Number: 1169
Article:
Compensation of the Stress Gradient in Physical Vapor Deposited Al1−xScxN Films for Microelectromechanical Systems with Low Out-of-Plane Bending
Authors:
by
Rossiny Beaucejour, Michael D’Agati, Kritank Kalyan and Roy H. Olsson III
Link:
https://www.mdpi.com/2072-666X/13/8/1169
MDPI offers high quality article reprints with convenient shipping to destinations worldwide. Each reprint features a 270 gsm bright white cover
and 105 gsm premium white paper, bound with two stitches for durability and printed in full color. The cover design is customized to your article
and designed to be complimentary to the journal.