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Journal: Micromachines, 2022
Volume: 13
Number: 1169

Article: Compensation of the Stress Gradient in Physical Vapor Deposited Al1−xScxN Films for Microelectromechanical Systems with Low Out-of-Plane Bending
Authors: by Rossiny Beaucejour, Michael D’Agati, Kritank Kalyan and Roy H. Olsson III
Link: https://www.mdpi.com/2072-666X/13/8/1169

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