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Journal: Micromachines, 2022
Volume: 13
Number: 987

Article: Vacuum Inner Spacer to Improve Annealing Effect during Electro-Thermal Annealing of Nanosheet FETs
Authors: by Dong-Hyun Wang, Khwang-Sun Lee and Jun-Young Park
Link: https://www.mdpi.com/2072-666X/13/7/987

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