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Journal: Micromachines, 2022
Volume: 13
Number: 1042
Article:
Effect of the Oxidation Process on Carrier Lifetime and on SF Defects of 4H SiC Thick Epilayer for Detection Applications
Authors:
by
Alessandro Meli, Annamaria Muoio, Riccardo Reitano, Enrico Sangregorio, Lucia Calcagno, Antonio Trotta, Miriam Parisi, Laura Meda and Francesco La Via
Link:
https://www.mdpi.com/2072-666X/13/7/1042
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