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Journal: Micromachines, 2022
Volume: 13
Number: 783
783
Article: Growth of Highly c-Axis Oriented AlScN Films on Commercial Substrates
Authors: by Jingxiang Su, Simon Fichtner, Muhammad Zubair Ghori, Niklas Wolff, Md. Redwanul Islam, Andriy Lotnyk, Dirk Kaden, Florian Niekiel, Lorenz Kienle, Bernhard Wagner and Fabian Lofink
Link: https://www.mdpi.com/2072-666X/13/5/783

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