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Journal: Micromachines, 2022
Volume: 13
Number: 759
Article:
Integrated Piezoresistive Normal Force Sensors Fabricated Using Transfer Processes with Stiction Effect Temporary Handling
Authors:
by
Ni Liu, Peng Zhong, Chaoyue Zheng, Ke Sun, Yifei Zhong and Heng Yang
Link:
https://www.mdpi.com/2072-666X/13/5/759
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