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Journal: MicromachinesVolume: 13Number: 759
Article: Integrated Piezoresistive Normal Force Sensors Fabricated Using Transfer Processes with Stiction Effect Temporary Handling
  • Authors:
  • Ni Liu1,
  • Peng Zhong2,3 and
  • Chaoyue Zheng2,3
  • et al.
Link: https://www.mdpi.com/2072-666X/13/5/759

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