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Journal: Micromachines, 2022
Volume: 13
Number: 398
Article:
PowderMEMS—A Generic Microfabrication Technology for Integrated Three-Dimensional Functional Microstructures
Authors:
by
Thomas Lisec, Ole Behrmann and Björn Gojdka
Link:
https://www.mdpi.com/2072-666X/13/3/398
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