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Journal: Micromachines, 2022
Volume: 13
Number: 390

Article: Development and Characterization of ZnO Piezoelectric Thin Film Sensors on GH4169 Superalloy Steel Substrate by Magnetron Sputtering
Authors: by Guowei Mo, Yunxian Cui, Junwei Yin and Pengfei Gao
Link: https://www.mdpi.com/2072-666X/13/3/390

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