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Journal: Micromachines, 2022
Volume: 13
Number: 218

Article: Integration of Multifocal Microlens Array on Silicon Microcantilever via Femtosecond-Laser-Assisted Etching Technology
Authors: by Bao-Xu Wang, Jia-Xin Zheng, Jin-Yong Qi, Ming-Rui Guo, Bing-Rong Gao and Xue-Qing Liu
Link: https://www.mdpi.com/2072-666X/13/2/218

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