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Journal: Micromachines, 2022
Volume: 13
Number: 2247
Article:
Enhancing Performance of a MEMS-Based Piezoresistive Pressure Sensor by Groove: Investigation of Groove Design Using Finite Element Method
Authors:
by
Phongsakorn Thawornsathit, Ekachai Juntasaro, Hwanjit Rattanasonti, Putapon Pengpad, Karoon Saejok, Chana Leepattarapongpan, Ekalak Chaowicharat and Wutthinan Jeamsaksiri
Link:
https://www.mdpi.com/2072-666X/13/12/2247
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