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Journal: Micromachines, 2022
Volume: 13
Number: 1713
Article:
Reliability Evaluation Based on Mathematical Degradation Model for Vacuum Packaged MEMS Sensor
Authors:
by
Guizhen Du, Xianshan Dong, Xinglong Huang, Wei Su and Peng Zhang
Link:
https://www.mdpi.com/2072-666X/13/10/1713
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